MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering, 2nd Edition Design, Manufacture, and Nanoscale Engineering 2nd Edition – PDF/EPUB Version Downloadable

Upper level undergraduate and graduate level students in departments of mechanical, or electrical engineering in courses usually titled “microsystems design”, “MEMS”, or “Microsystem Fabrication”.  Engineers and designers in government and industry research and design centers and members of professional organizations like IEEE, and ASME.