MEMS Reliability – PDF/EPUB Version Downloadable
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Author(s): Allyson L. Hartzell; Mark G. da Silva; Herbert R. Shea
Publisher: Springer
ISBN: 9781441960177
Edition:
Description
The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.
